@misc{Institute_of_Electronic_Materials_Technology_Warszawa_2000_Proceedings_2001,
 author={Institute of Electronic Materials Technology Warszawa 2000},
 volume={29},
 number={1/2},
 copyright={Rights Reserved - Free Access},
 journal={Electronic Materials},
 address={Warszawa},
 howpublished={online},
 year={2001},
 publisher={ITME},
 language={eng},
 title={Proceedings of the 1st Joint Seminar Poland-Japan on Micromachining: september 4, 2000},
 type={Text},
 URL={http://rcin.org.pl/Content/17659/PDF/WA901_21173_M1_r2001-t29-z1-2_Mater-Elektron-Kon_i.pdf},
 keywords={Electronic- materials, Electronic - journal - materials, micromachining, MEMS},
}