@misc{Borkowicz_Jerzy_Metoda_1975, author={Borkowicz Jerzy}, volume={9}, editor={Korec Jacek}, number={1}, copyright={Rights Reserved - Free Access}, journal={Electronic Materials}, address={Warszawa}, howpublished={online}, year={1975}, publisher={Wydaw. Przemysłu Maszynowego "WEMA"}, language={pol}, title={Metoda dwutemperaturowego wzrostu krzemowych warstw epitaksjalnych = Two-temperature growth of Si epitaxial layers}, type={Text}, URL={http://rcin.org.pl/Content/19788/PDF/WA901_10595_M1_r1975-z1-9_Mater-Elektron-Bork_i.pdf}, keywords={Electronic - materials, Electronic - journal - materials, epitaxial layer, Si, CVD}, }