@misc{Nossarzewska-Orłowska_Elżbieta_Niektóre_1976, author={Nossarzewska-Orłowska Elżbieta}, editor={Pawłowska Marta}, number={1(7)}, copyright={Rights Reserved - Free Access}, journal={Proceedings of ONPMP}, address={Warszawa}, howpublished={online}, year={1976}, publisher={Wydaw. Przem. Masz.}, language={pol}, title={Niektóre defekty obserwowane w homoepitaksjalnych warstwach krzemu = Some of observed defects in silicon homoepitaxial layers}, type={Text}, URL={http://rcin.org.pl/Content/28990/PDF/WA901_17246_r1976-z1-7_Prace-ONPMP-Noss_i.pdf}, keywords={Electronic - journal - material, Electronic materials, defect, epitaxial layer, Si}, }