@misc{Zynek_Jadwiga_Azotek_2008,
 author={Zynek Jadwiga},
 volume={36},
 number={4},
 copyright={Rights Reserved - Free Access},
 journal={Electronic Materials},
 address={Warszawa},
 howpublished={online},
 year={2008},
 publisher={ITME},
 language={pol},
 title={Azotek krzemu stosowany w technologii planarnych fotodiod wykonanych na bazie InP = Silicon nitride for InP based planar photodiode applications},
 type={Text},
 URL={http://rcin.org.pl/Content/7486/PDF/WA901_16028_M1-r2008-t36-z4_Mater-Elektroniczne_Zynek_i.pdf},
 keywords={Electronic - journal - materials, Electronic - materials, silicon nitride, PECVD, planar photodiode, InP},
}