@misc{Tomaszewski_Henryk_Effect_2003,
 author={Tomaszewski Henryk},
 volume={31},
 number={1/2},
 copyright={Rights Reserved - Free Access},
 address={Warszawa},
 journal={Electronic Materials},
 howpublished={online},
 year={2003},
 publisher={ITME},
 language={eng},
 type={Text},
 title={Effect of oxygen nonstoichiometry of ceramic targets on deposition process of TiO2 by DC magnetron sputtering},
 URL={http://rcin.org.pl/Content/17968/PDF/WA901_15608_M1_r2003-t31-z1-2_Mater-Elektron-Tom_i.pdf},
 keywords={Electronic - journal - materials, Electronic - materials, magnetron sputtering, TiO2},
}