@misc{Grudzieński_Andrzej_Metoda_1980,
 author={Grudzieński Andrzej},
 volume={25},
 editor={Nossarzewska-Orłowska Elżbieta},
 editor={Tomaszewski Jacek},
 number={1},
 copyright={Rights Reserved - Free Access},
 address={Warszawa},
 journal={Electronic Materials},
 howpublished={online},
 year={1980},
 publisher={Wydaw. Przemysłu Maszynowego "WEMA"},
 language={pol},
 type={Text},
 title={Metoda kontrolowanego zaokrąglania płytek krzemowych = The method of the controllable silicon wafer edge rounding},
 URL={http://rcin.org.pl/Content/18452/PDF/WA901_11446_M1_r1979-z1-25_Mater-Elektron-Gru_i.pdf},
 keywords={Electronic - journal - materials, Electronic - materials, silicon wafer, edge rounding},
}