@misc{Reuther_H._Some_1986, author={Reuther, H. and Richter, E.}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={Prace IPPT IFTR REPORTS}, howpublished={online}, year={1986}, publisher={Instytut Podstawowych Problemów Techniki Polskiej Akademi Nauk}, language={eng}, title={Some partical aspects of ion implantation}, type={Text}, URL={http://rcin.org.pl/Content/3085/PDF/WA727_10692_56867-30-1986_Reuther-Some-25.pdf}, keywords={Warstwa wierzchnia}, }