@misc{Korec_Jacek_Modelowanie_1985,
 author={Korec Jacek},
 number={15},
 copyright={Rights Reserved - Free Access},
 address={Warszawa},
 journal={Proceedings of ITME},
 howpublished={online},
 year={1985},
 publisher={Wydaw. Przem. Masz. "WEMA"},
 language={pol},
 title={Modelowanie procesu epitaksji z fazy gazowej = The modeling of the CVD epitaxial process},
 type={Text},
 URL={http://rcin.org.pl/Content/31005/PDF/WA901_17852_r1985-z15_Prace-ITME-Korec_i.pdf},
 keywords={Electronic - journal - material, Electronic materials, CVD, modeling of epitaxial process, Si},
}