@misc{Szeliga_Paweł_Matrixes_1999, author={Szeliga Paweł}, editor={Kruszewski Jerzy}, number={1}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={NEXUS Research News}, howpublished={online}, year={1999}, publisher={Institute of Electronic Materials Technology}, language={eng}, type={Text}, title={Matrixes of planar microlenses}, URL={http://rcin.org.pl/Content/39045/PDF/WA901_55968_r1999-z1_NEXUS-Szeliga-matry_%20i.pdf}, keywords={micro lens array, photolitography}, }