Zdejmowanie cienkich warstw z płytek krzemowych metodą utleniania anodowego i rozpuszczania utworzonego tlenku = Removal of thin layers from silicon wafersby means of an anodic oxidation and dissolution of the oxides formed - Digital Repository of Scientific Institutes

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Zdejmowanie cienkich warstw z płytek krzemowych metodą utleniania anodowego i rozpuszczania utworzonego tlenku = Removal of thin layers from silicon wafersby means of an anodic oxidation and dissolution of the oxides formed

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Title: Zdejmowanie cienkich warstw z płytek krzemowych metodą utleniania anodowego i rozpuszczania utworzonego tlenku = Removal of thin layers from silicon wafersby means of an anodic oxidation and dissolution of the oxides formed

Creator:

Jaskólska Halina

Date issued/created:

Resource type:

Subtitle:

Materiały Elektroniczne 1976 nr 3(15)

Contributor:

Waliś Lech ; Gołkowska Anna

Publisher:

Wydaw. Przemysłu Maszynowego WEMA

Place of publishing:

Description:

s. 20-30 : il. 24 cm. ; Bibliogr. s. 30

Relation:

Electronic Materials

Volume:

Issue:

Start page:

End page:

Detailed Resource Type:

Format:

application/pdf

Resource Identifier:

oai:rcin.org.pl:20308

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Subject and keywords:

Electronic - journal - materials Electronic - materials removal of thin layers Si anodic oxidation dissolution of oxide

Object collections:

Last modified:

Oct 2, 2020

In our library since:

Feb 19, 2013

Number of object content downloads / hits:

1748

All available object's versions:

https://rcin.org.pl/publication/10866

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MATERIAŁY ELEKTRONICZNE

Edition name	Date
Jaskólska Halina, Zdejmowanie cienkich warstw z płytek krzemowych metodą utleniania anodowego i rozpuszczania utworzonego tlenku	Oct 2, 2020

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