RCIN and OZwRCIN projects

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Title: Poprawa jakości polerowanych płytek SiC metodą chemicznego utleniania i obróbki termicznej. Badania jakości powierzchni metodami rentgenowskimi = Improvement of the quality of SiC wafers polished using chemical oxidation and heat treatment. Examination of the quality of the surface using X-ray technoques

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Last modified:

Oct 2, 2020

In our library since:

May 20, 2013

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https://rcin.org.pl/publication/46202

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