@misc{Plewa_Dariusz_Dyfuzja_1994, author={Plewa Dariusz}, volume={22}, editor={Kozłowski Roman}, editor={Kamiński Paweł}, number={4}, copyright={Rights Reserved - Free Access}, journal={Electronic Materials}, address={Warszawa}, howpublished={online}, year={1994}, publisher={ITME}, language={pol}, title={Dyfuzja niklu w procesie wzrostu klrzemowych warstw epitaksjalnych = Nickel diffusion during the growth of epitaxial silicon}, type={Text}, URL={http://rcin.org.pl/itme/Content/14646/PDF/WA901_14630_M1_r1994-t22-z4_Mater-Elektron-Plewa_i.pdf}, keywords={Electronic - materials, Electronic - journal - materials, silicon epitaxy, nickel diffusion, Ni}, }