@misc{Piątkowski_Bronisław_Badania_2002,
 author={Piątkowski Bronisław},
 volume={30},
 editor={Zabierowski Piotr},
 editor={Miros Artur},
 number={3},
 copyright={Rights Reserved - Free Access},
 journal={Electronic Materials},
 address={Warszawa},
 howpublished={online},
 year={2002},
 publisher={ITME},
 language={pol},
 title={Badania nad mechanicznym i chemicznym pocienianiem termicznie połączonych płytek krzemowych = The investigation of the mechanical and chemical thinning of silicon bonded wafers},
 type={Text},
 URL={http://rcin.org.pl/itme/Content/17720/PDF/WA901_15557_M1_r2002-t30-z3_Mater-Elektron-Pia_i.pdf},
 keywords={mechanical-chemical shinning, Si wafer, thermal bonding, Electronic - materials, Electronic - journal - materials},
}