@misc{Wolnik_Irena_Oznaczanie_1975, author={Wolnik Irena}, volume={11}, editor={Chudy Marek}, editor={Wiśniewski Romuald}, number={3}, copyright={Rights Reserved - Free Access}, journal={Electronic Materials}, address={Warszawa}, howpublished={online}, year={1975}, publisher={Wydaw. Przemysłu Maszynowego "WEMA"}, language={pol}, title={Oznaczanie zanieczyszczeń w mieszaninach azotu z silanem = Determination of impurities in nitrogen and silane mixtures}, type={Text}, URL={http://rcin.org.pl/itme/Content/19872/PDF/WA901_10772_r1975-z3-11_Mater-Elektron-Wol_i.pdf}, keywords={Electronic - journal - material, Electronic - materials, contamination, gas mixture, N2, SiH4}, }