@misc{Nowysz_Karol_Badanie_1975,
 author={Nowysz Karol},
 volume={12},
 editor={Surma Barbara},
 number={4},
 copyright={Rights Reserved - Free Access},
 journal={Electronic Materials},
 address={Warszawa},
 howpublished={online},
 year={1975},
 publisher={Wydaw. Przemysłu Maszynowego "WEMA"},
 language={pol},
 title={Badanie jednorodności oporności krzemowych warstw epitaksjalnych = Investigations of homogenity of silicon epitaxial layers resistivity},
 type={Text},
 URL={http://rcin.org.pl/itme/Content/19885/PDF/WA901_10779_M1_r1975-z4-12_Mater-Elektron-Now_i.pdf},
 keywords={Electronic - journal - materials, Electronic - materials, resistivity, silicon epitaxial layer},
}