@misc{Piotrowski_Józef_Micro-machined_1996, author={Piotrowski Józef}, editor={Dobrzański Lech}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={MST News Poland}, howpublished={online}, year={1996}, publisher={Institute of Electronic Materials Technology}, language={eng}, title={Micro-machined silicon bolometers and thermal emitters}, type={Text}, URL={http://rcin.org.pl/itme/Content/18104/PDF/WA901_36462_r1996-z1_MST-News-Pol-Piotr_i.pdf}, keywords={micromechanics, microbolometers}, }