@misc{Dziuban_Jan_Micromechanics_1996, author={Dziuban Jan}, number={3}, copyright={Rights Reserved - Free Access}, address={Warszawa}, journal={MST News Poland}, howpublished={online}, year={1996}, publisher={Institute of Electronic Materials Technology}, language={eng}, type={Text}, title={Micromechanics on silicon}, URL={http://rcin.org.pl/itme/Content/38993/PDF/WA901_55851_r1996-z3_MST-Dziuban-micro_i.pdf}, keywords={micromechanics, Si}, }