<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="https://rcin.org.pl/itme/style/common/xsl/oai-style.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" 
         xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
         xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/
         http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
	<responseDate>2026-07-22T16:46:42Z</responseDate>
	<request identifier="oai:rcin.org.pl:29238" metadataPrefix="oai_dc" verb="GetRecord">
	https://rcin.org.pl/itme/oai-pmh-repository.xml</request>
	<GetRecord>
	
  <record>
	<header>
		<identifier>oai:rcin.org.pl:29238</identifier>
	    <datestamp>2020-10-02T15:45:05Z</datestamp>
		  <setSpec>rcin.org.pl</setSpec> 	      <setSpec>rcin.org.pl:partnerCollections:itme:proceedingsofitme</setSpec> 	      <setSpec>rcin.org.pl:literature</setSpec> 	      <setSpec>rcin.org.pl:literature:booksChapters</setSpec> 	      <setSpec>rcin.org.pl:partnerCollections:itme</setSpec> 	      <setSpec>rcin.org.pl:partnerCollections</setSpec> 	    </header>
		<metadata>
	<oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
<dc:title xml:lang="en"><![CDATA[Proceedings of ONPMP 1977 nr 12]]></dc:title>
<dc:title xml:lang="en"><![CDATA[Chromatograficzne metody analizy mieszanin gazowych H2+5% PH3, H2+10% AsH, H2+0,05% H2Se. Zastosowanie chromatografu z defektorem helowym w analizie gazów do celów półprzewodnikowych = Chromatographic methods of analysis of H2+5% PH3, H2+10% AsH3, H2+0,05% H2Se gas. The use of chromatography with a helicum detector in the analysis of gases for semiconductor manufacturing]]></dc:title>
<dc:title xml:lang="pl"><![CDATA[Prace ONPMP 1977 nr 12]]></dc:title>
<dc:title xml:lang="pl"><![CDATA[Chromatograficzne metody analizy mieszanin gazowych H2+5% PH3, H2+10% AsH, H2+0,05% H2Se. Zastosowanie chromatografu z defektorem helowym w analizie gazów do celów półprzewodnikowych]]></dc:title>
<dc:creator><![CDATA[Wolnik Irena]]></dc:creator>
<dc:subject xml:lang="en"><![CDATA[Electronic - journal - material]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[Electronic materials]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[gas chromatography]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[helium detector]]></dc:subject>
<dc:subject xml:lang="en"><![CDATA[gas analysis]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[Materiały elektroniczne]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[Elektronika - czasopismo - materiały]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[chromatografia]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[defekt helowy]]></dc:subject>
<dc:subject xml:lang="pl"><![CDATA[analiza gazów]]></dc:subject>
<dc:description xml:lang="en"><![CDATA[3-26 s. : il. ; 24 cm.]]></dc:description>
<dc:description xml:lang="en"><![CDATA[Bibliogr. s. 26]]></dc:description>
<dc:description xml:lang="pl"><![CDATA[3-26 s. : il. ; 24 cm.]]></dc:description>
<dc:description xml:lang="pl"><![CDATA[Bibliogr. s. 26]]></dc:description>
<dc:publisher><![CDATA[Wydaw. Przem. Masz.]]></dc:publisher>
<dc:contributor><![CDATA[Wiśniewski Romuald]]></dc:contributor>
<dc:date><![CDATA[1977]]></dc:date>
<dc:type xml:lang="en"><![CDATA[Text]]></dc:type>
<dc:type xml:lang="pl"><![CDATA[Tekst]]></dc:type>
<dc:format xml:lang="en"><![CDATA[application/pdf]]></dc:format>
<dc:format xml:lang="pl"><![CDATA[application/pdf]]></dc:format>
<dc:identifier><![CDATA[https://rcin.org.pl/itme/dlibra/publication/17296/edition/29238/content]]></dc:identifier>
<dc:identifier><![CDATA[oai:rcin.org.pl:29238]]></dc:identifier>
<dc:source xml:lang="en"><![CDATA[ITME, sygn. dostępny]]></dc:source>
<dc:source xml:lang="en"><![CDATA[http://katalog.pan.pl/webpac-bin/218bitmeEN/wgbroker.exe?new+-access+top+search+open+NR+kv_5861]]></dc:source>
<dc:source xml:lang="pl"><![CDATA[ITME, sygn. dostępny]]></dc:source>
<dc:source xml:lang="pl"><![CDATA[http://katalog.pan.pl/webpac-bin/218bitmePL/wgbroker.exe?new+-access+top+search+open+NR+kv_5861]]></dc:source>
<dc:language><![CDATA[pol]]></dc:language>
<dc:relation><![CDATA[Proceedings of ONPMP]]></dc:relation>
<dc:relation><![CDATA[oai:rcin.org.pl:publication:17296]]></dc:relation>
<dc:relation><![CDATA[Prace ONPMP]]></dc:relation>
<dc:rights xml:lang="en"><![CDATA[Rights Reserved - Free Access]]></dc:rights>
<dc:rights xml:lang="pl"><![CDATA[Prawa zastrzeżone - dostęp nieograniczony]]></dc:rights>
</oai_dc:dc>

</metadata>
	  </record>	</GetRecord>
</OAI-PMH>
