Title:

Chromatograficzne metody analizy mieszanin gazowych H2+5% PH3, H2+10% AsH, H2+0,05% H2Se. Zastosowanie chromatografu z defektorem helowym w analizie gazów do celów półprzewodnikowych = Chromatographic methods of analysis of H2+5% PH3, H2+10% AsH3, H2+0,05% H2Se gas. The use of chromatography with a helicum detector in the analysis of gases for semiconductor manufacturing

Subtitle:

Proceedings of ONPMP 1977 nr 12

Creator:

Wolnik Irena

Contributor:

Wiśniewski Romuald

Publisher:

Wydaw. Przem. Masz.

Place of publishing:

Warszawa

Date issued/created:

1977

Description:

3-26 s. : il. ; 24 cm. ; Bibliogr. s. 26

Subject and Keywords:

Electronic - journal - material ; Electronic materials ; gas chromatography ; helium detector ; gas analysis

Relation:

Proceedings of ONPMP

Issue:

12

Start page:

3

End page:

26

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open