Title:

Krzemowe warstwy homoepitaksjalne = Homoepitaxial silicon layers

Subtitle:

Proceedings of ONPMP 1978 z. 6

Creator:

Korec Jacek

Contributor:

Rupniewski Wojciech ; Wójcik Marek

Publisher:

Wydaw. Przem. Masz. "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1978

Description:

64, [1] s. : il. 24 cm. ; Bibliogr. s. 62-63

Subject and Keywords:

Electronic - journal - material ; Electronic materials ; silicon epitaxy ; homoepitaxial layer

Relation:

Proceedings of ONPMP

Issue:

6

Start page:

3

End page:

64

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open