Title:

Metoda otrzymywania monokrystalicznych folii krzemowych z wykorzystaniem krzemu porowatego = A method of obtaining monocrystalline silicon foils using porous silicon

Subtitle:

Electronic Materials Vol. 42 Nr 1

Creator:

Sarnecki Jerzy

Contributor:

Brzozowski Andrzej ; Lipiński Dariusz

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2014

Description:

Bibliogr. p.: 31 ; p.: 24-31 il., 30 cm.

Type of object:

Book/Chapter

Subject and Keywords:

epitaxial layer ; porous silicon ; CVD ; silicon foil

Abstract:

24

References:

31

Relation:

Electronic Materials

Volume:

42

Issue:

1

Start page:

24

End page:

31

Resource type:

Text

Detailed Resource Type:

Article

Format:

30 cm ; application/pdf

Source:

ITME, sygn. ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open